Substrate khoom yog lub pobzeb ntawm lub tshuab hluav taws xob kev lag luam tsim hluav taws xob. Cov khoom sib txawv ntawm cov khoom sib txawv, qhov kev xav tau rau lwm txoj kev loj hlob ntawm technology, kev sib tw siv technology thiab cov cuab yeej ntim cov tshuab, cov khoom siv substrate txiav txim qhov kev tsim cov tshuab hluav taws xob tshuab hluav taws xob.
Qhov kev xaiv ntawm substrate cov khoom nyob ntawm tsuas yog nyob rau hauv 9 yam nram qab no:
Cov yam ntxwv zoo ntawm cov yam ntxwv, cov khoom siv epitaxial thiab cov khoom siv los ntawm cov khoom siv sib npaug ntawm cov qub los yog cov zoo sib xws, me me, zoo crystallinity,
Cov qauv zoo sib txawv, yog qhov zoo rau cov khoom siv epitaxial nucleation thiab muaj zog adhesion
Tshuaj stability yog qhov zoo, nyob rau hauv kev loj hlob epitaxial ntawm qhov kub thiab cua tsis yooj yim zom thiab corrosion
Ua kom zoo thermal, nrog rau cov thermal conductivity thiab thermal ua haujlwm
Kev coj ua zoo, tuaj yeem ua tau thiab siab ua
Zoo optical kev ua tau zoo, cov ntaub ua los ntawm lub teeb emitted los ntawm substrate yog me me
Cov khoom siv zoo, cov khoom ua tau yooj yim, xws li thinning, polishing thiab txiav
Tsawg nqe
Loj loj, feem ntau yuav tsum muaj kab uas tsis pub tsawg tshaj 2 ntiv
Qhov kev xaiv ntawm lub substrate kom tau raws li cov cuaj cuaj saum toj no yog qhov nyuaj heev. Yog li ntawd, tam sim no tsuas yog los ntawm kev siv technology hauv kev loj hlob thiab kev siv cov cuab yeej siv los hloov cov kev sib txawv ntawm cov khoom siv hluav taws xob thiab kev tsim tawm thiab kev tsim tawm. Muaj ntau ntau cov substrates rau gallium nitride, tiam sis tsuas muaj ob lub substrates uas yuav siv rau cov khoom, uas yog sapphire Al2O3 thiab silicon carbide SiC substrates. Cov lus 2-4 muaj qhov sib txawv ntawm qhov kev ua tiav ntawm 5 substrates rau kev loj hlob nitrate nitrate.
Kev luj xyuas ntawm cov khoom siv lo substrate yuav tsum ua ntsuas cov nram qab no:
Tus qauv ntawm cov substrate thiab epitaxial zaj duab xis match: cov khoom siv epitaxial thiab cov khoom siv substrate siv lead ua los ntawm tib los yog cov zoo sib xws, khaus qhov tsis sib haum me me, zoo crystallinity, defect ntom tsawg;
Lub thermal expansion coefficient ntawm cov substrate thiab cov yeeb yaj kiab zaj duab xis: qhov thermal expansion coefficient ntawm qhov khoom sib piv yog ib qho tseem ceeb, cov zaj duab xis epitaxial thiab cov khoom siv hauv cov thermal expansion coefficient sib txawv tsis tsuas yog ua tau kom txo tau cov yeeb yaj kiab uas zoo tshaj plaws, tab sis nyob rau hauv txoj kev ua hauj lwm ntaus ntawv, vim muaj cua sov Ua rau lub cuab yeej ua mob;
Cov tshuaj ruaj khov ntawm substrate thiab epitaxial zaj duab xis match: cov khoom siv substrate yuav tsum muaj kev ruaj ntseg stability, nyob rau hauv kev loj hlob epitaxial thiab cua tsis yooj yim zom thiab corrosion, tsis tau vim cov tshuaj tiv thaiv nrog epitaxial zaj duab xis kom txo qhov zoo ntawm zaj yeeb yam epitaxial;
Cov ntaub ntawv npaj txog cov teeb meem thiab cov nqi ntawm kev siv nyiaj: xav txog cov kev xav tau ntawm kev lag luam, cov khoom siv cov khoom npaj kom yooj yim, tus nqi yuav tsum tsis txhob siab. Qhov loj me me yog feem ntau tsis tshaj 2 nti.
Tam sim no muaj ntau cov ntaub ntawv substrate rau GaN-based LEDs, tab sis tam sim no tsuas muaj ob lub substrates uas yuav siv rau kev lag luam, nam yawg sapphire thiab silicon carbide substrates. Lwm yam xws li GaN, Si, ZnO substrate tseem nyob hauv kev loj hlob, muaj tseem qee deb ntawm industrialization.
Gallium nitride:
Qhov zoo tagnrho substrate rau kev loj hlob ntawm GaN yog GaN tib khoom siv lead ua, uas tuaj yeem txhim kho cov siv lead ua zoo ntawm epitaxial zaj duab xis, txo qhov dislocation ceev, txhim kho lub neej ua haujlwm ntawm lub cuab yeej, ua kom muaj txiaj ntsig zoo thiab ua kom cov ntiav ua haujlwm tam sim no. Txawm li cas los xij, txoj kev npaj ntawm GaN Crystal yog ib qho nyuaj heev, yog li ntawd tsis muaj txoj hau kev zoo.
Zinc oxide:
ZnO tau muaj peev xwm los ua GaN epitaxial tus neeg sib tw substrate, vim hais tias ob tug muaj ib tus cwj pwm zoo heev. Ob leeg siv coj los ua qauv zoo tib yam, lub cim ntim taub hau me me heev, qhov txwv tsis pub lub dav hlau kaw (qhab nrog cov nqi tsis tshuav yog me, kev tiv thaiv tsis muaj teeb meem me me). Txawm li cas los, qhov tsis muaj zog ntawm ZnO ua ib tug GaN epitaxial substrate yog yooj yim rau decompose thiab corrode ntawm qhov kub thiab cua ntawm GaN epitaxial loj hlob. Tam sim no, ZnO semiconductor cov ntaub ntawv tsis tuaj yeem siv los ua khoom siv optoelectronic lossis cov khoom siv hluav taws xob hauv high-speed, feem ntau ntawm cov khoom tsis mus txog rau theem ntaus thiab P-hom doping teeb meem tsis tau daws tiag, tsim rau ZnO-based semiconductor khoom khoom loj hlob tseem tsis tau tsim tau zoo.
Sapphire:
Feem ntau cov substrate rau kev loj hlob ntawm GaN yog Al2O3. Nws qhov zoo yog kev ruaj ntseg tshuaj, tsis txhob nqhis pom lub teeb, pheej yig, kev siv cuab yeej technology kuj yog kev paub tab. Tsis zoo rau thermal conductivity Txawm hais tias tus ntaus tsis raug nyob rau hauv cov hauj lwm me me tam sim no tsis muaj cuab kev txaus, tab sis nyob rau hauv lub hwj chim ntawm high-current ntaus ntawv nyob rau hauv lub chaw ua hauj lwm ntawm qhov teeb meem yog heev mas.
Silicon carbide:
SiC raws li cov khoom siv dav siv hauv cov sapphire, yog tsis muaj peb sab substrate rau coj mus muag ntau ntawm GaN LED. SiC substrate muaj kev ruaj ntseg tshuaj zoo, cov hluav taws xob ua kom zoo, kev thermal conductivity, tsis txhob nqhis pom lub teeb, tab sis tsis muaj ntau yam kuj tseem ceeb heev, xws li cov nqi siab dhau lawm, cov kev ua tsis zoo siv tsis yooj yim rau Al2O3 thiab Si li Tsis tas li ntawd, SiC substrate nqus ntawm 380 nm hauv qab UV teeb, tsis tsim rau txoj kev loj hlob ntawm UV LEDs hauv qab 380 nm. Vim yog cov khoom zoo thiab cov thermal conductivity ntawm SiC substrate, nws yuav daws tau qhov teeb meem ntawm cov cua sov ntawm lub zog Power GaN device, yog li nws plays lub luag hauj lwm tseem ceeb hauv cov tshuab hluav taws xob hluav taws xob.
Piv nrog sapphire, SiC thiab GaN epitaxial zaj duab xis lattice matching yog khees me ntsis lawm. Tsis tas li ntawd, SiC muaj cov xiav luminescent xuab zeb, thiab cov khoom ua tsis tshua muaj zog, tuaj yeem ua rau cov electrodes, kom lub cuab yeej ua ntej lub ntim ntawm cov zaj duab xis epitaxial yog qhov kev sim siab kom txhim kho cov SiC raws li cov khoom siv kev sib tw. Vim tias cov qauv ntawm SiC tau yooj yim cleaved, zoo siab cleavage ntws yuav muab tau ntawm lub substrate thiab cov zaj duab xis epitaxial, uas ua kom yooj yim rau cov qauv ntawm lub cuab yeej; tab sis tib lub sij hawm, vim nws cov txheej txheem fawm kib, Cov yeeb yaj kiab zaj yeeb yaj duab qhia txog coob tus cov kauj ruam.
Lub hom phiaj ntawm kev ua tau zoo ntawm kev ua haujlwm zoo yog kev cia siab rau GaB ntawm GaN substrate, ua kom tsis tshua muaj nqi, tab sis kuj los ntawm GaN substrate kom ua kom txuag, loj cheeb tsam, tib lub teeb siab kom ua tau zoo, nrog rau kev sib tw siv kev ua haujlwm yooj yim thiab tawm los txhim kho. Thaum lub semiconductor teeb pom kev zoo los ua ib qhov kev muaj tiag, nws qhov tseem ceeb npaum li Edison invented liab qab. Ib zaug hauv lub substrate thiab lwm qhov chaw siv tshuab fais fab kev lag luam kom ncav cuag, nws cov txheej txheem kev lag luam yuav ua rau kev loj hlob sai.
Kub khoom: IP65 slim LED txoj kev teeb , LED dimming linear teeb , 60cm linear teeb , IP65 tri-proof teeb
